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Green Lithography for Delicate Materials

https://doi.org/10.1002/adfm.202101533

Grebenko, Artem; Bubis, Anton; Motovilov, Konstantin; Dremov, Viacheslav; Korostylev, Evgeny; Kindiak, Ivan; Fedorov, Fedor S.; Luchkin, Sergey; Zhuikova, Yuliya; Trofimenko, Aleksandr; et al (July 2021, Advanced Functional Materials)
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